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Table 1 Operating parameters of the HWS at a semiconductor fab and the design criteria of Taiwan Environmental Protection Agency

From: Honeycomb wet scrubber for acidic gas control: modeling and long-term test results

Operating parameter Value Criteria Unit
aWetting factor 0.1 ≥ 0.1 m2 h−1
Retention time 0.5 ≥ 0.5 sec
Pressure drop 49 ~ 78.4 Pa
Airflow rate 100 m3 min−1
Liquid flow rate 2600 L min− 1
pH 7.5 ~ 9.0 ≥ 7
Packing material 483 ≥ 90 m2 m−3
  1. aWetting factor = scrubbing water flow rate divided by (the specific surface area of the packing materials times the horizontal cross-sectional area of the tower)