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Table 1 Operating parameters of the HWS at a semiconductor fab and the design criteria of Taiwan Environmental Protection Agency

From: Honeycomb wet scrubber for acidic gas control: modeling and long-term test results

Operating parameter

Value

Criteria

Unit

aWetting factor

0.1

≥ 0.1

m2 h−1

Retention time

0.5

≥ 0.5

sec

Pressure drop

49 ~ 78.4

Pa

Airflow rate

100

m3 min−1

Liquid flow rate

2600

L min− 1

pH

7.5 ~ 9.0

≥ 7

Packing material

483

≥ 90

m2 m−3

  1. aWetting factor = scrubbing water flow rate divided by (the specific surface area of the packing materials times the horizontal cross-sectional area of the tower)