Table 1 Operating parameters of the HWS at a semiconductor fab and the design criteria of Taiwan Environmental Protection Agency
From: Honeycomb wet scrubber for acidic gas control: modeling and long-term test results
| Operating parameter | Value | Criteria | Unit |
|---|---|---|---|
| aWetting factor | 0.1 | ≥ 0.1 | m2 h−1 |
| Retention time | 0.5 | ≥ 0.5 | sec |
| Pressure drop | 49 ~ 78.4 | – | Pa |
| Airflow rate | 100 | – | m3 min−1 |
| Liquid flow rate | 2600 | – | L min− 1 |
| pH | 7.5 ~ 9.0 | ≥ 7 | – |
| Packing material | 483 | ≥ 90 | m2 m−3 |